Links：http://www.planoptik.com/cnt/references/nano.html
百靈佳殷格翰Respimat軟霧吸入器, Plan Optik Glass wafer 玻璃晶圓
適喘樂舒沛噴Respimat的核心部位玻璃晶圓(glass wafer)由德國Plan Optik AG製造提供。適喘樂舒沛噴Respimat軟霧吸入器, 由德國百靈佳殷格翰公司(Boehringer Ingelheim microParts GmbH)開發。
自華光電 - 德國Plan Optik AG 玻璃晶圓/石英晶圓/載體晶圓 台灣獨家代理商。
Allen K. Lin | Allen@myblossom.tw | LINE ID: Allen-007 | Wechat ID: Allen-006 | T: 0910-782775
The cavities within the micro structured silicon wafer (below) are capped with the glass wafer by Plan Optik. Once the so-called bonding process has been carried out the nozzles thus formed are isolated by means of a dicing process.
